Process for manufacturing thin film of high-Tc superconducting oxide.

摘要

A process for manufacturing a thin film of high-Tc superconducting oxide by means of chemical vapor deposition technique using vaporizing sources for the elements constituting the superconducting oxide and a carrier gas with oxygen, which process comprises depositing a layer of an oxide composition on a substrate under a chemical deposition condition of a temperature below 1,000 DEG C and a reduced pressure from vaporizing sources for the elements including at least barium, yttrium and copper and subjecting the so deposited layer to epitaxial crystal growth to form an oxide thin film having a chemical composition of Ba2YCu3O7-y, wherein said vaporizing sources consist each of an organic complex compound, such as beta -diketone complex.