发明名称 SUBSTRATE FIXING METHOD AND SUBSTRATE FIXING STRUCTURE
摘要 <p>PURPOSE:To maintain a substrate in an original form, eliminate deformation at the time of fixing, and improve plotting position precision. CONSTITUTION:One side surface of a substrate 1 to be plotted is brought into point contact with the tips of three first pins 27, the other side surface of the substrate 1 to be plotted is pressed with a second pin on the axial line which passes the contact point of the first pins 27 and the substrate 1 to be plotted and perpendicularly intersects the surface of the substrate 1 to be plotted, and both of the surface of the substrate 1 to be plotted are clamped with first pins 27 and the second pin.</p>
申请公布号 JPH07147227(A) 申请公布日期 1995.06.06
申请号 JP19930319092 申请日期 1993.11.24
申请人 OKI ELECTRIC IND CO LTD 发明人 NODA SHUICHI
分类号 H01L21/027;H01L21/68;H01L21/683;(IPC1-7):H01L21/027 主分类号 H01L21/027
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