| 摘要 |
<p>PURPOSE:To provide a cold cathode electron source manufacturing method by which cold cathode electron source elements are manufactured stably at low cost in easy processes wherein the elements have a large surface area and show excellent properties. CONSTITUTION:Manufacture of a cold cathode electron source involves a process to form a resist film on the surface of a conductive layer for an emitter 3 into a wedge-like shape and a process to remove the part of the conductive layer which comes out of the resist film for the emitter 3 by etching, wherein the resist film has smaller surface area of the lower main face in the conductive layer side for the emitter 3 than that of the upper main face, which is a photosensitive face, and has scratches. As a result, cold cathode electron source elements which can exhibit stable and excellent properties by emitters 3 having 50nm or smaller curvature and sharp edge parts are manufactured reproducibly at low cost and high production yield by simple processes and the elements can have a large surface area.</p> |
