THIN FILM FORMING DEVICE,申请号JP19940037268-传众专利搜索

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发明名称	THIN FILM FORMING DEVICE
摘要
申请公布号	JPH07145476(A)	申请公布日期	1995.06.06
申请号	JP19940037268	申请日期	1994.03.08
申请人	KAO CORP	发明人	KITAORI NORIYUKI;YOSHIDA OSAMU;MIZUNOYA HIROHIDE;WAKABAYASHI SHIGEMI;SHIGA AKIRA
分类号	C23C14/24;G11B5/85;(IPC1-7):C23C14/24	主分类号	C23C14/24
代理机构		代理人
主权项
地址

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