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发明名称
PRODUCTION OF SEMICONDUCTOR SINGLE CRYSTAL
摘要
申请公布号
JPH07144992(A)
申请公布日期
1995.06.06
申请号
JP19930316013
申请日期
1993.11.22
申请人
KOMATSU ELECTRON METALS CO LTD
发明人
SHIBATA MASAHIRO;SUGITA FUMITADA;KAWASHIMA SHIGEKI;FUKUDA NOBUYUKI
分类号
C30B15/00;C30B15/20;H01L21/02;(IPC1-7):C30B15/00
主分类号
C30B15/00
代理机构
代理人
主权项
地址
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