| 摘要 |
PURPOSE:To provide a semiconductor acceleration sensor which is improved in temperature characteristic and in yield. CONSTITUTION:An acceleration sensor substrate 1 is obtained by forming a peripheral fixing section 11, central acting section 12 which receives forces of acceleration, and thin flexible section 13 which connects the sections 11 and 12 with each other by machining a semiconductor substrate and forming a diffused resistor on the surface of the flexible section 13. An integrally formed pedestal 2 having through holes 5 at its central part is stuck to the base of the fixing section 11 and a weight body 3 which is prepared separately from the pedestal 2 is stuck to the base of the acting section 12 before or after or simultaneously with the sticking of the pedestal 2 to the base of the section 11. |
