发明名称 |
PLASMA REMOVAL OF UNWANTED MATERIAL |
摘要 |
A method for removing coatings from surfaces without damaging the underlying surface includes placing a surface having material to be removed thereon into a plasma reactor and exposing it to a gaseous plasma comprising a reactive halogen species. The reactive halogen species may be derived from one or more of many well known halogen gases. An optional step of cleaning the coating prior to exposure to the halogen plasma is recommended.
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申请公布号 |
CA2021315(C) |
申请公布日期 |
1995.06.06 |
申请号 |
CA19902021315 |
申请日期 |
1990.07.17 |
申请人 |
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发明人 |
KNAPP, JAMES HOWARD;CARNEY, GEORGE FRANCIS;CARNEY, FRANCIS JOSEPH |
分类号 |
C01B7/01;B01J19/08;C23F4/00;C23G5/00;H01L21/302;H01L21/3065;(IPC1-7):B01J19/08;B05D3/14;H05H1/00 |
主分类号 |
C01B7/01 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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