发明名称 TEMPERATURE CONTROLLER
摘要 <p>PURPOSE:To control sample temperature stably over a wide range by varying the contact area between a holder and a temperature control part. CONSTITUTION:For the purpose of using a temperature controller for a high- temperature region (300-600 deg.C), pushing up a holder 2 with a cylinder 5 causes a spacer 3 to separate from a spacer 4. The holder is rotated by a predetermined angle by a stepping motor 6. The holder 2 is lowered by the cylinder 5 back to a state (a), the bottom of the spacer 3 comes to contact with the top of the spacer 4. At this time, as shown by (h), the area of a contact 9 between the bottom of the spacer 3 and the top of the spacer 4 becomes smaller than in a state (e). As a result, this temperature controller serves for a high- temperature region with a small cooling efficiency. The holder 2 is returned to the state (a) by an operation reverse to the above operation to turn this temperature controller for low-temperature use with a large cooling efficiency.</p>
申请公布号 JPH07147318(A) 申请公布日期 1995.06.06
申请号 JP19930319106 申请日期 1993.11.25
申请人 NEC CORP 发明人 NOMURA YOUJI
分类号 H01L21/683;F28C3/00;F28F13/00;H01L21/203;H01L21/205;H01L21/68;(IPC1-7):H01L21/68 主分类号 H01L21/683
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