,申请号JP19840250340-传众专利搜索

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发明名称
摘要
申请公布号	JPH0752718(B2)	申请公布日期	1995.06.05
申请号	JP19840250340	申请日期	1984.11.26
申请人		发明人
分类号	C23C16/44;C23C16/48;C23C16/50;C23C16/54;H01L21/205;H01L21/263;H01L21/302;H01L21/31;(IPC1-7):H01L21/205	主分类号	C23C16/44
代理机构		代理人
主权项
地址

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