| 摘要 |
PURPOSE:To form a photosensitive layer in a clean coating atmosphere and to prevent the generation of a coating defect by integrating an upper shielding plate and side plates at the time of coating the photosensitive layer and separating these plates when the coating of the photosensitive layer is finished. CONSTITUTION:A coating tank 5 filled with a coating liquid 4 rises toward a cylindrical substrate 1 held by a substrate holder 2 in the upper where substrate immersion is executed. At this time, the side plates 6 exist around the coating tank 5 in the beginning and rise together with the coating tank 6. The side plates stop in the state that their top ends come into tight contact with the upper shielding plate 3 when the substrate immersion is finished. Next, the coating tank 5 descends and the coating of the surface of the photosensitive substrate 1 with the photosensitive layer is executed. At this time, the side plates 6 function as 'wind shields'. The upper shielding plate 3 and the side plates 6 are disconnected and the side plates 6 return to the home position alongside the coating tank 5 at the time point when the coating of the photosensitive layer is finished. The sag of the film thickness, etc., are prevented by this disconnection and the attachment and detachment of the substrate 1 are easily executed. |
