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发明名称
METHOD FOR FORMING PATTERNED POLYIMIDE COATING FILM ON SUBSTRATE
摘要
申请公布号
JPH07140673(A)
申请公布日期
1995.06.02
申请号
JP19930306994
申请日期
1993.11.15
申请人
DU PONT KK
发明人
ITABASHI TOSHIAKI
分类号
G03F7/32;H01L21/027;H01L21/312;(IPC1-7):G03F7/32
主分类号
G03F7/32
代理机构
代理人
主权项
地址
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