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发明名称
FILTER
摘要
申请公布号
JPH07142903(A)
申请公布日期
1995.06.02
申请号
JP19930284710
申请日期
1993.11.15
申请人
HITACHI LTD
发明人
HAYASHI TERUYOSHI;HARADA TAKU
分类号
H01L23/12;H01P1/203;(IPC1-7):H01P1/203
主分类号
H01L23/12
代理机构
代理人
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