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发明名称
REFLECTION PREVENTIVE CONTACT MATERIAL AND FINE PATTERN FORMING METHOD USING THE SAME
摘要
申请公布号
JPH07142347(A)
申请公布日期
1995.06.02
申请号
JP19930286514
申请日期
1993.11.16
申请人
OKI ELECTRIC IND CO LTD
发明人
KANAMORI JUN
分类号
G03F7/11;H01L21/027;(IPC1-7):H01L21/027
主分类号
G03F7/11
代理机构
代理人
主权项
地址
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