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发明名称
PATTERN GENERATION OF IC TESTER
摘要
申请公布号
JPH07140211(A)
申请公布日期
1995.06.02
申请号
JP19930307122
申请日期
1993.11.15
申请人
HITACHI ELECTRON ENG CO LTD
发明人
MIYAHARA KUNIHIKO
分类号
G01R31/3183;(IPC1-7):G01R31/318
主分类号
G01R31/3183
代理机构
代理人
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