MANUFACTURE OF ORGANIC EL ELEMENT

摘要

PURPOSE:To prevent the element change due to the oxygen and moisture in the atmospheric air and reduce the nonluminescent portion by forming an organic substance on an anode without exposing the anode to the atmospheric air after the plasma surface treatment of the anode. CONSTITUTION:An ITO film which is an anode 2 on a glass substrate 1 is plasma-surface-treated, then a positive hole transportation layer 3 is formed on the ITO film as an organic substance layer while the anode 2 is not exposed to the atmospheric air. A luminescence layer 4 is formed as the organic substance layer while the ITO film surface cleaned by plasma surface treatment is not stained again. A cathode 5 is formed, then a sealing film 6 is formed. When the sealing film 6 is formed while an element is not exposed to the atmospheric air after the cathode 5 is formed, the alteration of the element due to the oxygen and moisture in the atmospheric air can be prevented, and the nonluminescent portion can be reduced.