发明名称 WIRE-BONDER
摘要 PURPOSE:To detect the grounding quickly without damaging a ball by a method wherein the output of an encoder and the set threshold value are compared and then a grounding signal of a capillary tool is output only when the output of the encoder satisfies the grounding conditions. CONSTITUTION:This equipment is provided with a horn 37 which holds a capillary tool 42 at its tip and which is supported pivotably so that it may move up and down, a motor 40 which moves the horn 37 up and down, etc. The motor 40 is driven to move down the horn 37 and the capillary tool 42. While the horn 37 is going down relatively fast before being grounded, the cycle of the output wave of an encoder E is relatively short. From the time when the descending speed of the horn 37 decreases until the time when the capillary tool 42 is grounded and the horn 37 stops, the cycle of the output wave of the encoder E grows longer. A comparator circuit compares the threshold value and the cycle and it outputs a grounding signal when the grounding conditions are satisfied. By this method, the grounding can be detected quickly and accurately without damaging a ball.
申请公布号 JPH07142526(A) 申请公布日期 1995.06.02
申请号 JP19930286582 申请日期 1993.11.16
申请人 MATSUSHITA ELECTRIC IND CO LTD 发明人 ARITA KIYOSHI;TAKAHASHI KOICHI
分类号 H01L21/60 主分类号 H01L21/60
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