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经营范围
发明名称
SEMICONDUCTOR TESTER
摘要
申请公布号
JPH07140204(A)
申请公布日期
1995.06.02
申请号
JP19930288481
申请日期
1993.11.17
申请人
MITSUBISHI ELECTRIC CORP
发明人
SAKAI KENICHI
分类号
G01R31/28;H01L21/66;(IPC1-7):G01R31/28
主分类号
G01R31/28
代理机构
代理人
主权项
地址
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