| 摘要 |
PURPOSE:To form a film having orientation applicable to a high resolution resist conveniently by controlling the ratio of constituents in the film optimally through the use of interaction concerning the concentration equilibrium of constituents between a thin film forming material solution and a lower layer solution. CONSTITUTION:A monomolecular film developed on the liquid level is transferred onto a substrate 17 thus forming a Langmuir-Blodgett film thereon. In this regard, the concentration of constituents in the film 15 controlled through the use of interaction concerning the concentration equilibrium between the constitutive molecules in a thin film forming solution and a lower layer liquid 15. For example, the orientation of main constituent is aligned by applying compressive pressure and the second and third constituents 12, 13 are eluted into the lower layer liquid 15 until a constituent ratio corresponding to the compressive pressure is obtained with respect to the main constituent 11. The ratio of constituents in the film is controlled optimally by controlling the compressive pressure. |
