DEVELOPMENT DEVICE

摘要

PURPOSE:To positively divide and recover a development liquid with a simple configuration. CONSTITUTION:A substrate 1 is pushed upward and is inclined by a push-up pin 41 of a substrate push-up device 4 at its edge part and a development liquid L on the surface flows down and is received by a conduit member 31 and then is recovered by a recovery tank 35 via a recovery pipe 34. The conduit member 31 is rotated inside with a rotary axis as the center when washing the substrate 1 and a side wall 31b screens washing liquid so that is does not mix into the recovery tank 35, thus positively and dividing and recovering only the development liquid supplied to the substrate surface.