| 摘要 |
PURPOSE:To eliminate the need for providing separate light source and to provide high alignment mark detection resolution. CONSTITUTION:The title semiconductor aligner is provided with (a) a laser light source 10 and a projection optical system light source comprised of a second harmonic wave generation device 20 wherein light projected from the laser light source is injected and light having a wavelength based on second harmonic wave of the incident light is projected, (b) off-axis/alignment detection systems 40, 41, 42, 44 and (c) an optical path dividing means which divides an optical path of light projected from the laser light source. Light divided by the optical path division means is made an illumination light source of an off-axis alignment detection system. |
