DEPOSITION OF THIN METAL FILM IN SEMICONDUCTOR DEVICE,申请号JP19930352990-传众专利搜索

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发明名称	DEPOSITION OF THIN METAL FILM IN SEMICONDUCTOR DEVICE
摘要
申请公布号	JPH07142411(A)	申请公布日期	1995.06.02
申请号	JP19930352990	申请日期	1993.12.29
申请人	NIPPON STEEL CORP	发明人	IZUMI HIROHIKO
分类号	C23C16/14;C23C16/44;H01L21/205;H01L21/28;H01L21/285;(IPC1-7):H01L21/205	主分类号	C23C16/14
代理机构		代理人
主权项
地址

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