| 摘要 |
PURPOSE:To obtain the composition contg. an acid generating agent enhanced in sensitivity to photolysis, with the sensitivity enhanced, capable of obtaining a high resolving power and suppressing lack of development by incorporating specified photosensitive s-triazine compd., novolac resin, acid cross-linkable compd. and solvent. CONSTITUTION:A photosensitive s-triazine compd. shown by formula I or II, novolac resin, an acid cross-linkable compd. and a solvent consisting essentially of propylene glycol monoalkyl ether and/or its esters are combined to constitute a photo-acid generating agent. In formulas I and II, R1 and R2 can be the same or different and are haloalkyls having 1-3 carbon atoms or haloalkenyls, R3 is hydrogen atom or methyl, R4 is the aryls or heterocyclic groups capable of being substituted, and (n) is 1 or 2. The known vinylhalomethyl-s-triazine compd. or arylhalomethyl-s-triazine compd. are exemplified as the compd. shown by the formula. |
