VOLATILE ORGANIC LANTHANIDE COMPOUNDS AND METHODS FOR THE PREPARATION OF LANTHANIDE-CONTAINING LAYERED MATERIALS FROM THESE COMPOUNDS

摘要

An adduct of a lanthanide (e.g. yttrium) β-diketonate and a donor ligand, the adduct being suitable for use in a metal-containing material deposition process, wherein the ligand has Lewis base characteristics that match the Lewis acid characteristics of the lanthanide β-diketonate in the absence of the ligand is described.