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发明名称
Anordnung zur Bestimmung von Positionen
摘要
申请公布号
DE4233331(C2)
申请公布日期
1995.06.01
申请号
DE19924233331
申请日期
1992.10.05
申请人
INSTITUT FUER MIKROSTRUKTURTECHNOLOGIE UND OPTOELEKTRONIK E.V., 35578 WETZLAR, DE
发明人
DETTMANN, FRITZ, DR., 6334 ASLAR, DE;LOREIT, UWE, DIPL.-ING., 6330 WETZLAR, DE
分类号
G01B7/00;G01D3/036;G01D5/14;G01D5/16;(IPC1-7):G01B7/02;G01D3/028
主分类号
G01B7/00
代理机构
代理人
主权项
地址
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