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发明名称
SEMICONDUCTOR DEVICE AND MANUFACTURE THEREOF
摘要
申请公布号
JPH07142578(A)
申请公布日期
1995.06.02
申请号
JP19930306996
申请日期
1993.11.15
申请人
NEC CORP
发明人
KUBO TORU
分类号
H01L23/522;H01L21/316;H01L21/768;(IPC1-7):H01L21/768
主分类号
H01L23/522
代理机构
代理人
主权项
地址
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