| 摘要 |
<p>A hexapod machine comprises a fixed structure (10, 11) and a movable structure (14, 15). Six extensible legs (18) are connected between the fixed and movable structures, and their lengths determine the relative position and orientation of the structures. The lengths of the legs are measured by respective laser interferometers (60, 62). To increase the accuracy of the measurement, a retroreflector (62) of the interferometer is directly mounted to and fast with one of the structures (14, 15), e.g. by means of a bracket (92) within a spherical air bearing (90).</p> |
