发明名称 METHOD FOR GROWING MIXED CRYSTAL IN LIQUID PHASE AND APPARATUS THEREFOR
摘要 PURPOSE:To grow a mixed single crystal at a high speed by transporting a solute according to the heat convection. CONSTITUTION:This method for growing a mixed crystal in the liquid phase is to heat a melt 30 contained in a double cylindrical container 20 through an outer cylindrical part 21 with a high-frequency heating coil 11, cool the melt from the lower side with a movable bed 23, produce the heat convection 33 in the melt 30, transport a microcrystal present in the upper layer part to the side of a seed crystal wafer 31, crystallize the microcrystal as a mixed single crystal 34, rapidly move a solute from a source part to a seed part and increase the growth rate of the mixed single crystal 34 capable of being sliced into plural mixed crystal substrates due to a relatively larger thickness of the resultant mixed single crystal 34 than that of a conventional mixed crystal.
申请公布号 JPH07138090(A) 申请公布日期 1995.05.30
申请号 JP19930281077 申请日期 1993.11.10
申请人 NISSHIN STEEL CO LTD 发明人 KURATA KAZUHIRO
分类号 C30B17/00;C30B19/04;C30B29/40;H01L33/30;H01S5/00 主分类号 C30B17/00
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