TREATMENT OF WASTE SOLUTION CONTAINING TETRAALKYLAMMONIUM HYDROXIDE

摘要

PURPOSE:To stably treat a waste soln. without clogging a reverse osmosis membrane by subjecting the org. matter in the waste soln. containing tetraalkylammonium hydroxide to oxidation treatment to convert the same to a monomeric substance or to decompose the same and supplying the treated soln. to the reverse osmosis membrane while neutralizing the same to separate the moisture in the waste soln. CONSTITUTION:A waste developing soln. (pH; 12-14) containing tetraalkylammonium hydroxide is pressurized by a pump 4 to be sent to an oxidation treatment tank 5 from a waste soln. storage tank 1 to be subjected to oxidation treatment by an oxidizing agent generating device 2 or the oxidizing agent from an oxidizing agent storage tank. By this method, a photoresist or a sensitizer being a polymeric substance is converted to a monomeric substance by oxidative decomposition and a surfactant or other org. matter is decomposed. An acid is added to the waste soln. within a neutralization treatment device 6 from an acid storage tank 3 to adjust the pH of the waste soln. to 6-8 and the treated waste soln. is supplied to a reverse osmosis membrane 9 under pressure from a reverse osmosis circulating storage tank 7 by a high pressure pump 8 and transmitted water 10 is taken out while a concn. soln. is circulated to the reverse osmosis circulating storage tank.