| 摘要 |
<p>PURPOSE:To efficiently recover the liquid in a rotary cup type liquid supplying device. CONSTITUTION:A coating liquid splashed from the surface of a water W is collected in a storage part 7. Thus caps 1, 13 are taken off from an inner cup 4 and a casing 2, and a also while the wafer W is lifted up with a chuck 5 and the wafer W is transferred to the next process, a nozzle 16 is moved to the storage part 7 and the tip is dipped into a coating liquid in the storage part 7 to suck and recover the coating liquid.</p> |
