| 摘要 |
PURPOSE:To obtain a metal titanate thin film free from generation of crack, peeling, etc., in heat-treatment by mixing and reacting a bivalent metal chloride with TiCl4 in an alkylene glycol and immersing a substrate in the obtained solution. CONSTITUTION:(A) A metal chloride expressed by formula MCl2 (M is a bivalent metal ion selected from barium, strontium, calcium, magnesium, cobalt, nickel, lead, zinc and cadmium) and (B) TiCl4 are mixed and dissolved in an alkylene glycol (e.g. ethylene glycol). The mixing molar ratio of the metal chloride to the alkylene glycol is preferably 1:(30-40). The mixture is preferably stirred at 40-85 deg.C to effect the reaction of the components. The obtained alkoxide solution is applied to a substrate by dipping the substrate in the solution or casting the solution on the surface of the substrate e.g. by spin-casting. The coating layer is dried and heat-treated to obtain the objective metal titanate thin film. |
