THERMOPLASTIC FLUORORESIN COMPOSITION AND JIG FOR SEMICONDUCTOR PRODUCTION PROCESS

摘要

PURPOSE:To obtain the subject composition useful as a jig for a semiconductor production process, having excellent chemical resistance, heat resistance and mechanical properties and only a slight dimensional change during heating by blending a thermoplastic fluororesin with a specific amount of a liquid crystal polyester having a specific structure. CONSTITUTION:This composition comprises (A) 100 pts.wt. of a thermoplastic fluororesin and (B) 3-90 pts.wt. of a liquid crystal polyester in which the component B is a copolymer of (i) tetrafluoroethylene and (ii) a perfluoroalkyl vinyl ether or a copolymer of the component (i) and (iii) ethylene and the component B comprises structural unit of formula I to formula III or formula I to formula IV in the molar ratio of formula II/I of 0.2-1.0, the molar ratio of (formula III+IV)/formula II of 0.9-1.1 and the molar ratio of the formula IV/formula III of 0-1.0.