FLUID FEED HEAD OF MICROPUMP

摘要

PURPOSE:To reduce any pressure impact and raise a feeding out efficiency and also realize a micropump with an accurate feed out amount and a low flow rate. CONSTITUTION:The fluid feed head of a micropump is provided with a flow passage means 10 having a first port 11, a second port 12 and a communication groove 13 communicating therewith, plural diaphragms whose surface are respectively exposed in the opening of the communication groove 13 and which can expand/retreat for the communication groove 13 and are installed in the second port 12 direction from the first port 11 along the communication groove 13 and a diaphragm support means 20 having plural operation gas spaces facing to the back surface of respective diaphragms installed in the opposite side of the communication grooves 13 on the diaphragm. In the communication groove 13 of the flow passage means 10, the cross section crossing orthogonally to its longitudinal direction has a bottom surface with a curve matching the expansion shape of the diaphragm.