发明名称 |
METHODS AND APPARATUS FOR ALTERING MATERIAL USING ION BEAMS |
摘要 |
A method and apparatus for treating material smfaces (13) using a repetitively pulsed ion beam (11). In particular, the treatment is tailored by adjusting treatment parameters of a pulsed iorl beam (11) to a duration less than or equal to 1000 ns and a repetition rate of less than 1 Hz. |
申请公布号 |
CA2176339(A1) |
申请公布日期 |
1995.05.26 |
申请号 |
CA19942176339 |
申请日期 |
1994.11.16 |
申请人 |
SANDIA CORPORATION |
发明人 |
BLOOMQUIST, DOUGLAS D.;BUCHHEIT, RUDY;GREENLY, JOHN B.;MCINTYRE, DALE C.;NEAU, EUGENE L.;STINNETT, REGAN W. |
分类号 |
B29C35/08;B29C59/16;C23C8/36;C23C14/48;G21K5/04;H01J3/04;H01J27/00;H01J27/08;H01J27/14;H01J37/08;H01L21/48 |
主分类号 |
B29C35/08 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|