发明名称 PULSED ION BEAM SOURCE
摘要 An improved magnetically-confined anode plasma pulsed ion beam source (25). Beam rotation effects and power efficiency are improved by a magnetic design which places the separatrix between the fast field flux structure (408) and the slow field structure (414) near the anode (410) of the ion beam source, by a gas port design (404, 406) which localizes the gas delivery into the gap between the fast coil (408) and the anode (410), by a pre-ionizer ringing circuit connected to the fast coil, and by a bias field means (180) which optimally adjusts the plasma formation position in the ion beam source.
申请公布号 CA2176337(A1) 申请公布日期 1995.05.26
申请号 CA19942176337 申请日期 1994.11.16
申请人 SANDIA CORPORATION 发明人 GREENLY, JOHN B.
分类号 B29C35/08;B29C59/16;C23C8/36;C23C14/48;G21K5/04;H01J3/04;H01J27/00;H01J27/08;H01J27/14;H01J37/08;H01L21/48 主分类号 B29C35/08
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