摘要 |
In order to suppress dispersion of threshold level voltages upon erasure of a large number of cells constituted from FETs having a floating gate electrode, drain electrode D, source electrode S and substrate Sub of each memory cell, all of the above electrodes are set to 0 V while a pulse of -19 v and a pulse width of 0.01 second is applied to control gate electrode CG to remove electrons accumulated in floating gate electrode FG by an F-N tunnel current. Then, while drain electrode D, source electrode S and substrate Sub are kept set to 0 V, another pulse of 14 V and a pulse width of 0.1 second is applied to control gate electrode CG to effect injection of electrons into floating gate electrode FG by the F-N tunnel current. <IMAGE> |