摘要 |
A positioning device comprising a table (5, 69), which is displaceable in two coordinate directions (X, Y) by means of Lorentz forces of electric linear motors over a base (3) and is guided over the base (3) by means of a static gas bearing, which has an air gap thickness independent of the coil systems and magnet systems (15-21, 37-43) in the motors. The positioning device is particularly suitable for the manufacture of masks with patterns for integrated circuits. |
申请人 |
PHILIPS ELECTRONICS N.V., EINDHOVEN, NL |
发明人 |
VAN ENGELEN, GERARD, NL-5656 AA EINDHOVEN, NL;BOUWER, ADRIANUS GERARDUS, NL-5656 AA EINDHOVEN, NL |