Semiconductor processing machine and suspension system for use in same.

摘要

A suspension system (130) for hanging a susceptor inside a reactor for processing semiconductor wafers. A hanger (132) is provided with a flange at its lower end for supporting the susceptor. A collar (144) has an internal flange (158) which engages with another flange (142) at the upper end of the hanger (132). The collar flange (158) and the hanger flange (142) each have a truncated, conical contact surface (143,159) which are in substantially continuous contact with each other. The mating flanges permit the susceptor to selfcenter and provide for different rates of thermal expansion of the collar (144) and hanger (132).