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经营范围
发明名称
Einkristallsilizium.
摘要
申请公布号
DE69013631(T2)
申请公布日期
1995.05.24
申请号
DE19906013631T
申请日期
1990.08.20
申请人
SHIN-ETSU HANDOTAI CO., LTD., TOKIO/TOKYO, JP
发明人
YOKOTA, SHUJI, ANNAKA-SHI, GUNMA-KEN, JP;YAMAGISHI, HIROTOSHI, ANNAKA-SHI, GUNMA-KEN, JP
分类号
C30B15/00;C30B29/06;H01L21/322;(IPC1-7):C30B15/00
主分类号
C30B15/00
代理机构
代理人
主权项
地址
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