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发明名称
Mit mehreren dünnen Filmen gleicher Flächenausdehnung beschichtete Unterlage zur Herstellung einer integrierten Dünnfilmschaltung
摘要
申请公布号
CH489117(A)
申请公布日期
1970.04.15
申请号
CH19670001472
申请日期
1967.02.01
申请人
WESTERN ELECTRIC COMPANY, INCORPORATED
发明人
JOSEPH HARENDZA-HARINXMA,ALFRED
分类号
C23F1/02;H01B1/00;H01G4/40;H01L49/02;(IPC1-7):H01L19/00
主分类号
C23F1/02
代理机构
代理人
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