Herstellungsverfahren eines abgeschirmten magnetoresistiven Sensors.

摘要

A shielded magnetoresistive (MR) sensor in which the first shield (12) is of sendust or super sendust and the second shield is of permalloy is made by the steps of depositing a layer of sendust or super sendust to form a first shield; heat treating the sendust layer at a temperature greater than 400 DEG C; depositing a first electrically insulating layer (18) ; depositing, in the presence of a magnetic field, a MR layer (20) ; depositing a second layer (26) of electrically insulating material; and, depositing a layer (28) of permalloy to form the second shield.