发明名称 |
Piezoelectric actuator. |
摘要 |
<p>In a piezoelectric actuator of the type which has a plurality of grooves on the outer side surface of the actuator body, mechanical reliability of the actuator is enhanced by providing grooves also in the respective layers of a material exhibiting electrostrictive effect located over and below the top and the bottom ends of the actuator. Moreover, a further improvement of mechanical strength can be attained by providing additional grooves onto the outer most grooves. <IMAGE></p> |
申请公布号 |
EP0479328(B1) |
申请公布日期 |
1995.05.24 |
申请号 |
EP19910117052 |
申请日期 |
1991.10.07 |
申请人 |
NEC CORPORATION |
发明人 |
INOUE, YOSHIKI;UEHARA, KANEO;OCHI, ATSUSHI |
分类号 |
H01L41/083;(IPC1-7):H01L41/08 |
主分类号 |
H01L41/083 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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