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发明名称
Composition for Polishing Crystalline Silicon and Germanium and Process.
摘要
申请公布号
GB1188820(A)
申请公布日期
1970.04.22
申请号
GB19670019936
申请日期
1967.05.01
申请人
TIZON CHEMICAL CORPORATION
发明人
RAYMOND LEO LACHAPELLE
分类号
C09K3/14;H01L21/306
主分类号
C09K3/14
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代理人
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