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发明名称
Device for microwave plasma generation.
摘要
申请公布号
EP0434933(B1)
申请公布日期
1995.05.24
申请号
EP19900120977
申请日期
1990.11.02
申请人
LEYBOLD AKTIENGESELLSCHAFT
发明人
GESCHE, ROLAND, DR.;KRETSCHMER, KARL-HEINZ, DR.
分类号
H01J37/32;H05H1/46;(IPC1-7):H05H1/46
主分类号
H01J37/32
代理机构
代理人
主权项
地址
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