| 摘要 |
PURPOSE:To make the collecting pressure of a nozzle and a nozzle chip constant by a control circuit by use of a spring provided on the vertically moving mechanism of the nozzle chip and a detector to allow the stable collection of the nozzle chip, and narrow the horizontally moving range to make a device conformable to the doubling of the nozzle. CONSTITUTION:An X-driving base 29 has a dispensing nozzle 4 pressed by a spring 30 and a spring contraction sensor 31, and at the collection of a nozzle chip 3, the collecting pressure is made constant by driving a constant pulse X-driving pulse motor 15 by a Z-motor control circuit 32 after the detection of the spring contraction sensor 31. Thus, a nozzle chip rack 2 is controlled for movement, whereby the mechanism can be minimized, and an easy device manufacture at low cost can be performed. |
