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发明名称	ETCHING
摘要
申请公布号	JPH07135198(A)	申请公布日期	1995.05.23
申请号	JP19930280816	申请日期	1993.11.10
申请人	SONY CORP	发明人	HANADA KAORU
分类号	C23F4/00;H01L21/302;H01L21/3065;(IPC1-7):H01L21/306	主分类号	C23F4/00
代理机构		代理人
主权项
地址

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