| 摘要 |
PURPOSE:To provide a method for manufacturing a multilayer electrostrictive element by laminating metallic electrode plates and piezoelectric ceramic plates alternately without imparting resiliency to the element. CONSTITUTION:The method for manufacturing a multilayer electrostrictive element comprises a first step for forming a plurality of planar members 1 of electrostrictive material and applying electrode films 2 to its opposite faces, a second step for forming a metallic planar member 3, and a third step for laminating the planar members 1 and 3 alternately, wherein the second step includes a step for tempering the metal and thus tempered metallic planar member 3 is employed in the third step. This method realizes a highly reliable and highly reliable electrostrictive effect actuator having high withstand voltage which allows driving in micro order. |
