| 摘要 |
An apparatus for transporting material, such as semiconductor wafers, between process modules coupled to a chamber. The transport apparatus includes a chamber; guide rails affixed to an outer surface of the chamber; one or more material transporters each including a motorized vehicle positioned outside the chamber and movable along the guide rails, a material carrier positioned inside the chamber, and magnetic levitation means for magnetically coupling the material carrier to the motorized vehicle through a nonmagnetic wall of the chamber; and a controller that controls the position of the motorized vehicle along the guide devices to move the material carrier to desired positions within the chamber.
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