| 摘要 |
PURPOSE:To measure the friction force in one direction, show the internal structure which can be deformed in a specific direction easily as an image, and evaluate viscoelastic behavior. CONSTITUTION:An interatomic force microscope 1 is provided with a vibration device for operating a relative vibration in vertical direction and a relative vibration in horizontal direction to a sample 8 and a probe 4 in superposition. A vibration in vertical vibration and that in horizontal vibration relative to the sample 8 and the probe 4 are operated in superposition to generate a vibration where the trace of the relative motion is in straight line or in annular shape to the probe 4 and the sample 8 or to generate a vibration in relative motion in side direction while the probe 4 is pressed into the sample 8, the response in the probe 4 is observed, and the friction coefficient and the inclination in specific direction of the sample 8 and the images of the elasticity rate in a specific direction, the internal defect, the foreign matter, and the structure body of the sample 8 are taken up. |
