| 摘要 |
PURPOSE:To produce an oxidation resistant carbon fiber reinforced carbon material having high oxidation resistance at high temp. CONSTITUTION:The surface of a substrate of a carbon fiber reinforced carbon material is subjected to multilayer coating by carrying out a 1st coating process in which gaseous SiO is brought into contact with the surface of the substrate and an SiC coating film is formed by a conversion method and a 2nd coating process in which a halogenated organosilicon compd. is brought into a reduction- thermal decomposition reaction and a 2nd SiC coating film is formed by CVD or pulse CVI or further carrying out a 3rd coating process in which a vitreous coating film is formed if necessary. At this time, the substrate is embedded in a powdery SiO2-carbon mixture, the 1st coating process is carried out under heating at <=1,800 deg.C and the treated substrate is cooled once and heated again in the temp. range of 1,800-2,200 deg.C in an atmosphere of gaseous Ar. |
