| 摘要 |
PURPOSE:To attain high sensitivity to radiation by incorporating poly(hydroxystyrene), hexamethoxymethylmelanine and an acid generating agent. CONSTITUTION:This radiation sensitive resin compsn. contains poly (hydroxystyrene) as a 1st component, hexamethoxymethylmelanine as a 2nd component and an acid generating agent as a 3rd component. The acid generating agent is a substance which is decomposed by the action of radiation such as light, electron beams, X-rays or ion beams and generates an acid. The poly(hydroxystyrene) acts as a matrix resin which dissolves in an aq. alkali soln. and the hexamethoxymethylmelanine converts the poly (hydroxystyrene) into gel and makes it insoluble in the aq. alkali soln. This crosslinking reaction is accelerated by the catalytic action of an acid supplied as a product obtd. by decomposing the acid generating agent by irradiation. |
